Wavelength Modulation Over 500 kHz of Micromechanically Tunable InP-Based VCSELs With Si-MEMS Technology |
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Abstract: | Wavelength modulation over 500 kHz by a micromechanically tunable vertical-cavity surface-emitting laser (VCSEL) consisting of an InP-based half-VCSEL chip and a micromachined silicon-on-insulator chip with a concave movable mirror has been demonstrated for the first time. A peak power of 3.5 mW, a tuning range of 55 nm, and a side-mode suppression ratio of about 60 dB have been demonstrated. |
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