| 修正环型纳米级超精密抛光机智能控制系统的实现 |
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| 引用本文： | 赵文宏,黄文君,冯冬芹,褚健,袁巨龙. 修正环型纳米级超精密抛光机智能控制系统的实现[J]. 机电工程, 2003, 20(3): 38-41 |
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| 作者姓名： | 赵文宏 黄文君 冯冬芹 褚健 袁巨龙 |
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| 作者单位： | 浙江大学,先进控制研究所,浙江,杭州,310027 |
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| 摘 要： | 针对现阶段抛光加工存在精度低、产品质量一致性差、成品率及生产效率低等问题，提出了一种适于高精度、高效率抛光加工的智能控制系统，并在修正环型纳米级超精密抛光机中得到实现。
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| 关 键 词： | 修正环型纳米级超精密抛光机 智能控制系统 抛光加工 金属抛光 |
| 文章编号： | 1001-4551(2003)03-0038-04 |
Realizing Method of Intelligent Controlling System of Ultraprecision Planarization Machine with Conditioning Ring at Nanometer Level |
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| ZHAO Wen|hong,HUANG Wen|jun,FENG Dong|qin,CHU Jian,YUAN Ju|long. Realizing Method of Intelligent Controlling System of Ultraprecision Planarization Machine with Conditioning Ring at Nanometer Level[J]. Mechanical & Electrical Engineering Magazine, 2003, 20(3): 38-41 |
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| Authors: | ZHAO Wen|hong HUANG Wen|jun FENG Dong|qin CHU Jian YUAN Ju|long |
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| Abstract: | In the paper, there are many problems such as low precision, bad uniformity of product quality, low efficiency of finished product and low productivity. Aiming at these problems, an intelligent controlling system which is fit for polishing for high precision and high efficiency is put forward in the paper, and this system is applied to the ultraprecision planarization machine with conditioning ring at nanometer level. |
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| Keywords: | conditioning ring ultraprecision planarization machine intelligent controlling system |
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