| 激光诱导化学气相沉积法制备纳米氮化硅及粉体光谱特性研究 |
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| 引用本文： | 王锐,李道火,黄永攀,罗丽明,浦坦. 激光诱导化学气相沉积法制备纳米氮化硅及粉体光谱特性研究[J]. 硅酸盐通报, 2004, 23(3): 6-9 |
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| 作者姓名： | 王锐 李道火 黄永攀 罗丽明 浦坦 |
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| 作者单位： | 中国科学院安徽光学精密机械研究所,合肥,230031;山东道钬纳米技术研究院,济南,250100;中国科学院安徽光学精密机械研究所,合肥,230031;山东道钬纳米技术研究院,济南,250100 |
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| 摘 要： | 氮化硅是优良的陶瓷材料,应用广泛.本文研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施,利用双光束激发制备了超微的、非晶纳米氮化硅粉体.实验证明,纳米氮化硅粉体具有一些特殊的物理性能和光谱特性.
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| 关 键 词： | LICVD Si3N4 双光束激发 红外吸收光谱 拉曼光谱 |
Study on Preparation of Silicon Nitride Nano-Powder with LICVD Technique and the Optical Characteristics of the Powder |
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| Wang Rui Li Daohuo Huang Yongpan Luo Liming Pu Tan. Study on Preparation of Silicon Nitride Nano-Powder with LICVD Technique and the Optical Characteristics of the Powder[J]. Bulletin of the Chinese Ceramic Society, 2004, 23(3): 6-9 |
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| Authors: | Wang Rui Li Daohuo Huang Yongpan Luo Liming Pu Tan |
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| Abstract: | Silicon nitride is a kind of excellent ceramic material. It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated Si were put forward. By applying double beam optical stimulation, the ultrafine and amorphous Si3N4 nano powder which possesses many peculiar physical characteristics as well as optical features was obtained. |
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| Keywords: | LICVD Si3N4 double beam optical stimulation infrared absorption spectra laman spectrum |
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