激光二坐标测量装置显微视觉关键技术的研究

为满足二维线纹标准器高精度检测需求,研究了激光二坐标测量装置的显微视觉系统关键技术.分析了激光二坐标测最装置的工作原理和显微视觉硬件系统的构成,提出了一种基于方向链码的边缘特征点跟踪提取算法,实现了图像边缘快速精确提取,建立了两坐标系间的修正模型,提高了测量精度.实验验证二维线纹标准器线间距和线宽测量重复性的2倍标准差小于10 nm.

Study on the Key Technology of Micro Vision in Laser Two-coordinate Measurement Device

The key technology of Micro-vision system in laser two-coordinate measurement device is studied to meet the needs of the high precision measurement of two-dimensional (2-D) line scale standard. The operation principle of laser two-coordinate measurement device and the hardware structure of micro-vision system are analyzed. A feature point tracking and detecting algorithm based on directional chain code is put forward to detecting image edges quickly and accurately. A rectification model of two coordinates is made to improve the accuracy of measurement. Experimental results reveal that the twice standard deviation of measurement repeatability of the line distance and line width 2-D line scale standard is less than 10nm.