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Nanoscale Conducting Oxide Writing: Nanoscale Writing of Transparent Conducting Oxide Features with a Focused Ion Beam (Adv. Mater. 6/2009) |
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| Authors: | Norma E. Sosa Jun Liu Christopher Chen Tobin J. Marks Mark C. Hersam |
| Affiliation: | 1. Department of Materials Science and Engineering and Materials Research Center Northwestern University 2220 Campus Drive, Evanston IL, 60208‐3108 (USA);2. Department of Chemistry and Materials Research Center Northwestern University 2145 Sheridan Road, Evanston IL, 60208‐3113 (USA) |
| Abstract: | |
| Keywords: | Surface Patterning Nanowires Scanning Probe Microscopy Lithography Thin Films |
