| 集成电路纯水设备 |
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| 引用本文： | 郭龙祥. 集成电路纯水设备[J]. 电子测试, 2020, 0(8): 134-135 |
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| 作者姓名： | 郭龙祥 |
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| 作者单位： | 华东光电集成器件研究所 |
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| 摘 要： | 本文就集成电路程序设备进行研究,希望可以为纯水设备的发展提供借鉴。
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| 关 键 词： | 集成电路 纯水设备 大规模集成电路 |
Integrated circuit pure water equipment |
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| Guo Longxiang. Integrated circuit pure water equipment[J]. Electronic Test, 2020, 0(8): 134-135 |
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| Authors: | Guo Longxiang |
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| Affiliation: | (East China Institute of optoelectronic integrated devices,Bengbu Anhui,233000) |
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| Abstract: | In this paper,the integrated circuit program equipment is studied,hoping to provide reference for the development of pure water equipment. |
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| Keywords: | integrated circuit pure water equipment LSI |
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