| 薄膜型TMA气体传感器的研制 |
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| 引用本文： | 管玉国,戴国瑞,南金,朱勇.薄膜型TMA气体传感器的研制[J].传感技术学报,1997,10(4):38-43. |
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| 作者姓名： | 管玉国 戴国瑞 南金 朱勇 |
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| 作者单位： | 吉林大学电子工程系!长春130023访问学者 副教授(管玉国)，吉林大学电子工程系!长春130023(戴国瑞，南金，朱勇) |
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| 摘 要： | 本文报道了采用等离子体ＣＶＤ方法制备Ｆｅ２Ｏ３／ＴｉＯ２薄膜材料，并用浸渍法对表面修饰了Ｉｎ，制成了检测鱼鲜度ＴＭＡ的薄膜气传感器，并具有很好的灵敏度，等。
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| 关 键 词： | 气体传感器 TMA气体 表面修饰 传感器 敏感器件 |
Fabrication of Thin Film Gas Sensor for Detecting Fish Frishness |
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| GuanYuguo Dai Guorui Nan Jin Zhu Yang.Fabrication of Thin Film Gas Sensor for Detecting Fish Frishness[J].Journal of Transduction Technology,1997,10(4):38-43. |
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| Authors: | GuanYuguo Dai Guorui Nan Jin Zhu Yang |
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| Affiliation: | Dept. of Electronic Engineering. Jilin University. Changchun. 130023 |
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| Abstract: | Fe2O3-TiO2 thin films were prepared by means of plasma enhanced chemical vapour deposition methods and the film surface were modified by means of soaked technique with indium. Thin films gas sensors were fabricated for detecting trimethylamine gases. The sensitivity, selectivity, stability and respose-restoring characteristics of film sensors are all excellent. |
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| Keywords: | sensorstrimethylamine gases surface modification |
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