| 同步辐射单色光形貌术观察6H-SiC单晶中的微管缺陷 |
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| 引用本文： | 胡小波,徐现刚,李现祥,董捷,韩荣江,王丽,李娟,王继扬,田玉莲,黄万霞,朱佩平.同步辐射单色光形貌术观察6H-SiC单晶中的微管缺陷[J].人工晶体学报,2004,33(3):332-334. |
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| 作者姓名： | 胡小波 徐现刚 李现祥 董捷 韩荣江 王丽 李娟 王继扬 田玉莲 黄万霞 朱佩平 |
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| 作者单位： | 山东大学晶体材料国家重点实验室,济南,250100;北京高能物理研究所同步辐射实验室,北京,100039 |
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| 基金项目： | 国家自然科学基金(No.60025049)和863计划资助项目 |
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| 摘 要： | 采用同步辐射单色光形貌术观察了6H-SiC单晶中的微管缺陷,发现晶片中Burgers矢量为1c的螺位错具有较高的密度.此外,还观察到对应较大Burgers矢量的微管.基于微管附近的应变场,并根据衍射几何,模拟计算了一系列具有不同Burgers矢量的微管在形貌像中的直径,计算结果与实验观察符合较好.
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| 关 键 词： | 同步辐射单色光形貌术 6H-SiC单晶 微管 模拟计算 |
| 文章编号： | 1000-985X(2004)03-0332-03 |
Observation of Micropipes in 6H-SiC Monocrystalline by Synchrotron Radiation Monochromatic X-ray Topography |
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| HU Xiao-bo,XU Xian-gang,LI Xian-xiang,DONG Jie,HAN Rong-jiang,WANG Li,LI Juan,WANG Ji-yang,TIAN Yu-lian,HUANG Wan-xia,ZHU Pei-ping.Observation of Micropipes in 6H-SiC Monocrystalline by Synchrotron Radiation Monochromatic X-ray Topography[J].Journal of Synthetic Crystals,2004,33(3):332-334. |
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| Authors: | HU Xiao-bo XU Xian-gang LI Xian-xiang DONG Jie HAN Rong-jiang WANG Li LI Juan WANG Ji-yang TIAN Yu-lian HUANG Wan-xia ZHU Pei-ping |
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| Affiliation: | HU Xiao-bo~1,XU Xian-gang~1,LI Xian-xiang~1,DONG Jie,HAN Rong-jiang~1,WANG Li~1,LI Juan~1,WANG Ji-yang~1,TIAN Yu-lian~2,HUANG Wan-xia~2,ZHU Pei-ping~2 |
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| Abstract: | Micropipes in 6H-SiC monocrystalline were observed by synchrotron radiation X-ray topography. A large number of 1c screw dislocations were found in this wafer. In addition, micropipes with huge Burgers vectors were also observed. Based on the strain field around the micropipe and the diffraction geometry, the diameters of micropipes with different Burgers vectors in topograph were simulated. The calculated values are in good agreement with the experimental observation. |
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| Keywords: | synchrotron radiation monochromatic X-ray topography 6H-SiC monocrystalline micropipe simulation |
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