大长度激光测量中阿贝误差消除方法的研究

提出一种基于3路独立激光干涉仪消除大长度激光测量中的阿贝误差的方法,3路干涉仪的安装位置可布置成任意三角形。通过3路干涉仪的测量结果及被测仪器与3路干涉仪安装位置的几何关系,构造一路与被测仪器同光路的虚拟干涉仪,推导虚拟干涉仪的测长公式。该算法对干涉仪的安装位置无特殊要求,在实践中易于实现。为验证算法的有效性,依托于室内80 m大长度标准装置,通过改变被测仪器安装位置,在45 m范围内进行了3组不同的验证实验。实验结果显示消除阿贝误差后,残余的其它误差的最大值仅为1.10 μm,该算法可有效地消除阿贝误差。

Research on Abbe Error Elimination Method for Large Length Laser Measurement

To eliminate the Abbe error in large length laser measurement, an algorithm which based on three independent laser interferometers is proposed. The mounting positions of three interferometers can be arranged in any triangle. By using the length data measured from the three interferometers, and with the geometric relationship between the mounting positions of the instrument to be calibrated and the three interferometers, a virtual interferometer which has a common path with the calibrated instrument is constructed, then the length measuring formula is derived. This method has no special requirement respect to the mounting positions of the three interferometers, so it is very easy to implement in practice. To verify the effectiveness of the algorithm, relying on the indoor 80 meters large length standard measurement device, by changing the mounting position of the calibrated instrument, 3 different experiments are carried out within 45 m measurement range. As the experiment indicates that after eliminating the Abbe error, the maximum of the other remaining error is only 1.10 μm, the result show that the proposed algorithm can eliminate the Abbe error effectively.