| 硬质合金表面多弧离子镀(Ti,Al,Zr,Cr)N多元氮化物膜 |
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| 引用本文： | 赵时璐,张钧,刘常升.硬质合金表面多弧离子镀(Ti,Al,Zr,Cr)N多元氮化物膜[J].金属热处理,2009,34(9). |
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| 作者姓名： | 赵时璐 张钧 刘常升 |
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| 作者单位： | 1. 东北大学材料各向异性与织构工程教育部重点实验室,辽宁,沈阳,110004;沈阳大学机械工程学院,辽宁,沈阳,110044
2. 东北大学材料各向异性与织构工程教育部重点实验室,辽宁,沈阳,110004 |
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| 基金项目： | 辽宁省高等学校优秀人才支持计划(RC-05-05);;长江学者和创新团队发展计划(IRT0713) |
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| 摘 要： | 采用Ti-Al-Zr合金靶和Cr靶,用多弧离子镀技术在WC-8%Co硬质合金基体上沉积(Ti,Al,Zr,Cr)N多元氮化物膜。分析了薄膜的成分、形貌、粗糙度和结构,研究了薄膜的显微硬度、膜/基结合力和抗高温氧化性能。结果表明,获得的多元氮化物膜仍是B1-NaCl型TiN面心立方结构;适当控制偏压条件可以改善薄膜的表面形貌;在不同的偏压条件下,(Al+Zr+Cr)/(Ti+Al+Zr+Cr)的成分比为0.41～0.43,当其比值趋于0.4时,薄膜的显微硬度和膜/基结合力达到最大值3600HV0.01和200N;同时薄膜的抗高温氧化性能提高,最高温度可达700℃左右。
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| 关 键 词： | 多弧离子镀 TiN基硬质膜 显微硬度 结合力 抗高温氧化性 |
Multi-component(Ti,Ai, Zr, Cr)N films deposited on cemented carbide by multi-arc ion plating technology |
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| ZHAO Shi-lu,ZHANG Jun,LIU Chang-sheng.Multi-component(Ti,Ai, Zr, Cr)N films deposited on cemented carbide by multi-arc ion plating technology[J].Heat Treatment of Metals,2009,34(9). |
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| Authors: | ZHAO Shi-lu ZHANG Jun LIU Chang-sheng |
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| Affiliation: | 1.Key Laboratory for Anisotropy and Texture of Materials;Ministry of Education;Northeastern University;Shenyang Liaoning 110004;China;2.School of Mechanism Engineering;Shenyang University;Shenyang Liaoning 110044;China |
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| Abstract: | Using Ti-Al-Zr target and pure Cr target,the multi-component(Ti,Al,Zr,Cr)N films were deposited on the substrates of cemented carbide(WC-8%Co)by multi-arc ion plating technique.The composition,morphology,roughness and structure of the films were analyzed.The micro-hardness,binding force between the films and the substrates,as well as the high temperature oxidation resistance were studied.The results show that the multi-component nitride films still demonstrate the TiN(B1-NaCl)face-centered cubic structure.T... |
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| Keywords: | multi-arc ion plating TiN base hard film micro-hardness binding force high temperature oxidation resistance |
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