| 基于Halcon的IC测试探针表面质量的机器视觉检测系统 |
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| 引用本文： | 徐鹏,黄志红,刘飞飞,罗贤平. 基于Halcon的IC测试探针表面质量的机器视觉检测系统[J]. 南方冶金学院学报, 2014, 0(1): 60-64 |
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| 作者姓名： | 徐鹏 黄志红 刘飞飞 罗贤平 |
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| 作者单位： | [1]江西理工大学电气工程与自动化学院,江西赣州341000 [2]江西理工大学期刊社,江西赣州341000 [3]江西理工大学机电工程学院,江西赣州341000 |
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| 基金项目： | 江西省教育厅科技项目（GJJ08271） |
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| 摘 要： | IC测试是集成电路生产中的重要工序,探针表面诸如划痕、凹坑等缺陷对性能测试结果影响大.文章研究了IC探针表面质量的机器视觉检测方法,讨论了灰度变换、均值滤波、区域连通、图像分割等缺陷图像处理和形状识别方法,建立了相应的探针表面质量检测系统,并基于机器视觉软件Halcon开发了探针表面质量检测系统软件.实验表明:开发的检测系统可对直径0.3~0.6 mm的IC测试探针表面质量进行快速检测评估,且系统的稳定性好、检测精度高,能有效缩短检测时间和减少检测成本.
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| 关 键 词： | IC测试探针 表面质量检测 机器视觉 Halcon软件 |
Surface quality machine vision inspection system of IC probe by the Halcon software |
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| XU Peng,HUANG Zhi-hong,LIU Fei-fei,LUO Xian-ping. Surface quality machine vision inspection system of IC probe by the Halcon software[J]. Journal of Southern Institute of Metallurgy, 2014, 0(1): 60-64 |
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| Authors: | XU Peng HUANG Zhi-hong LIU Fei-fei LUO Xian-ping |
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| Affiliation: | (Jiangxi University of Science and Technology, a. School of Electrical Engineering and Automation; b. Periodical Press; c. School of Mechanical ＆ Electrical Engineering, Gannzhou 341000, China) |
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| Abstract: | IC detection is an important step in the IC manufacture. The defects of IC probe surface, such as the abrasion and dent, deeply effect on the performance detection result. In this paper, the probe surface quality inspection method by the machine vision is studied, the defect image process and shape recognization method are discussed with the gray transform, mean filtering, region link and image segmentation. The surface quality inspection system is developed by means of Halcon software. It is satisfactory that the fast and accurate detection of the IC detection probe with its diameter of 0.3~0.6 mm and the detection cycle and low cost. |
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| Keywords: | IC detecting probe surface quality inspection machine vision Halcon software |
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