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Single step route to highly transparent,conductive and hazy aluminium doped zinc oxide films
Authors:Jianwei Li  Sanjayan Sathasivam  Alaric Taylor  Claire J. Carmalt  Ivan P. Parkin
Affiliation:Materials Chemistry Centre, Department of Chemistry, University College London, 20 Gordon Street, London WC1H 0AJ UK, Fax: +44 (0)20 7679 7463 ; Department of Electronic & Electrical Engineering, University College London, Torrington Place, London WC1E 7JE UK
Abstract:Light scattering yet transparent electrodes are important for photovoltaics as they increase device efficiency by prolonging light path lengths. Here, we present a novel single step route to highly textured Al doped ZnO thin films on glass substrates that show a minimum resistivity of ∼3 × 10−3 Ω cm and high visible light transmittance of 83% while still maintaining high haze factor of 63%. Roughness was imparted into the ZnO films during the synthetic process using acetylacetone and deionized water as additives. The highly hazy yet visible and near infrared transparent nature of the conductive ZnO:Al films allow it to be potentially used as an electrode material in amorphous and microcrystalline silicon solar cells.

A single step chemical vapour deposition route to highly conductive, transparent and hazy Al doped ZnO.
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