| 声表面波SO2气体传感器敏感膜的研究 |
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| 引用本文： | 魏培永,朱长纯,刘君华.声表面波SO2气体传感器敏感膜的研究[J].西安交通大学学报,2000,34(9):17-19,24. |
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| 作者姓名： | 魏培永 朱长纯 刘君华 |
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| 作者单位： | 西安交通大学,710049,西安 |
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| 基金项目： | 国家自然科学基金资助项目(697776037）；教育部博士点基金资助项目(98069828)． |
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| 摘 要： | 为了深入研究声表面波（ＳＡＷ）ＳＯ２气敏传感器频移与浓度之间的关系，对聚苯胺敏感膜的ＳＡＷ ＳＯ２传感器进行了试验与理论研究，并用双能谷模型推导了有关公式。解释了频移与浓度关系曲线中的拐点问题，为聚苯胺敏感膜的ＳＡＷ传感器应用提供了理论和实践依据。将有机物聚苯胺（ＰＡｎ）和硫化镉（ＣｄＳ）两者的气敏特性进行了对比，得出了ＳＯ２气敏膜具有双峰吸收的特点，并从理论上进行了论证，这对研究其他气敏膜也有指
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| 关 键 词： | 声表面波传感器 二氧化硫气体传感器 敏感膜 |
Thin Film of Surface Acoustic Wave Sensor for Sulfur Dioxide Gas |
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| Wei Peiyong,Zhu Changchun,Liu Junhua.Thin Film of Surface Acoustic Wave Sensor for Sulfur Dioxide Gas[J].Journal of Xi'an Jiaotong University,2000,34(9):17-19,24. |
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| Authors: | Wei Peiyong Zhu Changchun Liu Junhua |
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| Abstract: | PAn(polyaniline) thin film of surface acoustic wave (SAW) gas sensors was studied experimently and theoretically to explain the relations between frequency shift and sulfur dioxide concentration.Several formulas were derived using the double energy valley model to explain the critical dot of curve of frequency shift vs. sulfur dioxide gas concentration.Theory and experiment were provided to support the application of polyaniline thin film of SAW sensors. A polyaniline thin film was compared with a CdS thin film. The required characteristics of thin films for sulfur dioxide gas were obtained. |
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| Keywords: | surface acoustic wave sensor polyaniline thin film CdS |
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