新型静电驱动双向平动MEMS变形镜(英文)

设计了一种新型静电驱动双向平动的MEMS变形镜,其结构包括3部分:中央下电极,4个静电驱动杠杆结构以及反射镜面(上电极).该变形镜有两种驱动模式:向下驱动模式和向上驱动模式.在向上驱动时,4个杠杆结构实现了位移的放大;向下驱动时,利用了非线性弹性系数法扩展了镜面的平动范围.采用表面硅工艺完成了变形镜的加工.通过白光干涉仪对变形镜的测试表明:在向上驱动模式下,变形镜在驱动电压为31 V时位移达到1.1μm;在向下驱动模式下,变形镜在6 V的驱动电压下位移达到1.1μm.变形镜的总行程为2.2μm,达到了同样工艺下传统变形镜的3倍左右.

Novel Electrostatic Bidirectional-Translation MEMS Deformable Mirror

A novel electrostatic micro-electro-mechanical-system （MEMS） deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts： a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.