六自由度微动工作台柔性铰链设计

主要介绍了用于六自由度微动工作台的柔性铰链即双向柔性铰链和万向柔性铰链的设计过程，根据微动台中柔性铰链的设计要求，分析了微动台运动时驱动力与铰链变形的关系，确定了满足驱动力条件的柔性铰链刚度范围，并结合柔性铰链强度条件、工作台动态特性以及柔性铰链转角刚度与结构尺寸的关系，进一步确定柔性铰链的刚度和结构尺寸，合理设计柔性铰链．另外，通过有限元分析软件分析了柔性铰链最大受力时的应力分布情况．对柔性铰链的强度进行了校核，进一步保证了柔性铰链设计的正确性．

The Design of Flexure Hinge of 6-DOF Micro Table

This paper primarily introduces the design process of bidirectional flexure hinge and universal flexure hinge, which are used as rotational join of 6 degrees of freedom micro table. In order to reasonably design flexure hinge we analyzed the relation between driving force and angle of rotation of flexure hinge according to design requirements, and ascertain the range of flexure hinge stiffness that meets the conditions of driving force. And then we ascertain stiffness and structure size of flexure hinge based on strength condition of flexure hinge, dynamic characteristics of micro table and the relation between rotational stiffness and structure size of flexure hinge. We also analyze the stress distribution when the forces on flexure hinge are maximal by finite element software to ensure correctness of design.