| 新颖型非整体膜结构硅加速度计的研制 |
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| 引用本文： | 唐世洪,邓永和,张克梅. 新颖型非整体膜结构硅加速度计的研制[J]. 仪表技术与传感器, 2002, 0(5): 50-51 |
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| 作者姓名： | 唐世洪 邓永和 张克梅 |
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| 作者单位： | 湖南吉首大学物理与电子工程系,湖南省吉首市,416000 |
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| 摘 要： | 简要介绍了利用硅的各向异性腐蚀工艺研制的非整体膜结构的敏感硅芯片，较详细地报告了用此硅芯片封装成的加速度敏感元件，最后介绍这种加速度计的优良性能。
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| 关 键 词： | 研制 各向异性腐蚀 非整体膜 硅加速度计 |
| 修稿时间： | 2002-01-20 |
Development of non Integral Structure Film Si Accelerometer |
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| Tang Shihong Deng Yonghuo Chang Kemei Dept. of Phys.and Electronics Engin.,Jishou University,Jishou ,China. Development of non Integral Structure Film Si Accelerometer[J]. Instrument Technique and Sensor, 2002, 0(5): 50-51 |
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| Authors: | Tang Shihong Deng Yonghuo Chang Kemei Dept. of Phys.and Electronics Engin. Jishou University Jishou China |
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| Affiliation: | Tang Shihong Deng Yonghuo Chang Kemei Dept. of Phys.and Electronics Engin.,Jishou University,Jishou 416000,China |
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| Abstract: | The silicon chip of dual-E non-integral structure film which is prepared by the technique of anisotropic wet etching of silicon has been introduced.By the use of the silicon chip accelerometer elements have packaged.The excellent properties of this kind accelerometer are reported. |
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| Keywords: | Anisotropic Wet Etching Non-Integral Film Si Accelerometer |
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