| 无氢类金刚石碳膜的研究进展 |
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| 引用本文： | 任妮,马占吉,高欣.无氢类金刚石碳膜的研究进展[J].真空科学与技术学报,2003,23(3):176-181. |
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| 作者姓名： | 任妮 马占吉 高欣 |
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| 作者单位： | 兰州物理研究所,甘肃兰州,730000 |
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| 摘 要： | 介绍了无氢类金刚石碳膜的制备方法 ,它们的机械、光学、电学性能 ,将无氢与含氢的类金刚石碳膜进行了简单比较 ,总结及探讨了它们的应用
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| 关 键 词： | 无氢类金刚石 类金刚石碳 拉曼谱 摩擦 磨损 |
| 文章编号： | 0253-9748(2003)03-0176-06 |
| 修稿时间： | 2002年9月23日 |
Latest Development of Hydrogen-Free Diamond-Like Carbon Films |
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| Ren Ni ,Ma Zhanji,Gao Xin.Latest Development of Hydrogen-Free Diamond-Like Carbon Films[J].JOurnal of Vacuum Science and Technology,2003,23(3):176-181. |
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| Authors: | Ren Ni Ma Zhanji Gao Xin |
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| Affiliation: | Ren Ni *,Ma Zhanji,Gao Xin |
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| Abstract: | The strengths and weakness of a variety of hydrogen free and hydrogenated diamond like carbon films grown by all techniques available were compared and its mechanical,its optical and its electrical properties were reviewed with an application oriented motivation in a thought provoking way. |
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| Keywords: | Hydrogen free diamond like carbon DLC Raman spectra Friction Wear |
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