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| 使用激光跟踪仪测量研磨阶段离轴非球面面形 | |
| 引用本文： | 李杰,伍凡,吴时彬,匡龙,林常青.使用激光跟踪仪测量研磨阶段离轴非球面面形[J].光学学报,2012,32(1):112002-120. |
| 作者姓名： | 李杰 伍凡 吴时彬 匡龙 林常青 |
| 作者单位： | 李杰:中国科学院光电技术研究所, 四川 成都 610209中国科学院研究生院, 北京 100049 伍凡:中国科学院光电技术研究所, 四川 成都 610209 吴时彬:中国科学院光电技术研究所, 四川 成都 610209 匡龙:中国科学院光电技术研究所, 四川 成都 610209 林常青:中国科学院光电技术研究所, 四川 成都 610209 |
| 摘 要： | 为满足离轴非球面镜在光学检验前的面形检测需求，对使用激光跟踪仪测量离轴非球面的方法进行了研究。详细介绍了使用激光跟踪仪测量离轴非球面的检测步骤及数据处理方法。使用激光跟踪仪对一处于研磨阶段的口径为150 mm，顶点曲率半径为1200 mm，离轴量为240 mm的离轴抛物面镜进行了测量，进行了测量不确定度分析并与三坐标测量机的测量结果进行了比对。结果显示激光跟踪仪与三坐标测量机的面形测量峰谷值一致性优于1 μm。分析及实验结果表明此检测方法简单易行，灵活通用，适用于离轴非球面抛光前的面形检测。 |
| 关 键 词： | 测量 面形检测 离轴非球面 激光跟踪仪 研磨 |
| 收稿时间： | 2011/6/3 |
Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding |
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| Li Jie,Wu Fan,Wu Shibin,Kuang Long,Lin Changqing.Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding[J].Acta Optica Sinica,2012,32(1):112002-120. | |
| Authors: | Li Jie Wu Fan Wu Shibin Kuang Long Lin Changqing |
| Affiliation: | 1(1Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
| Abstract: | In order to measure the off-axis aspheric surface before optical testing, method of using a laser tracker to measure the surface shape is investigated. The procedure and data processing method of the measurement are introduced. Using a commercial laser tracker, an off-axis parabolic mirror with an aperture of 150 mm, radius of curvature of 1200 mm, and off-axis distance of 240 mm is measured. The measurement uncertainty is analyzed and measurement result is compared with that of coordinate measuring machine. The result shows a peak-to-valley value consistency better than 1 μm. The method is easy operation and flexible, and meets the measurement requirements of the off-axis aspheric mirror surface before polishing. |
| Keywords: | measurement surface measurement off-axis aspheric laser tracker grinding |
| 本文献已被 CNKI 等数据库收录！ | |
