| TiO2纳米微晶的RF-PCVD法制备及表征 |
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| 引用本文： | 徐海萍,孙彦平,王俊文,陈新谋. TiO2纳米微晶的RF-PCVD法制备及表征[J]. 材料科学与工艺, 2005, 13(4): 411-414,419 |
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| 作者姓名： | 徐海萍 孙彦平 王俊文 陈新谋 |
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| 作者单位： | 太原理工大学,洁净化工研究所,山西,太原,030024;石家庄新谋新科技开发有限公司,河北,石家庄,050091 |
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| 基金项目： | 国家自然科学基金 , 山西省科技攻关项目 |
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| 摘 要： | 以TiCl4为原料,采用高频等离子化学气相沉积(RF-PCVD)法制备了TiO2纳米微晶,考察了控制粒径大小及晶相转化的关键操作条件.借助XPS、TEM、XRD、BET等技术对颗粒的化学组成、形貌、晶相结构等进行了表征.研究表明:所得TiO2纳米微晶大部分为球形体颗粒,粒径30～50 nm,单分散性良好;颗粒中锐钛相和金红石相两相共存,结晶完整;金红石相含量在26.7%～53.6%之间可调.
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| 关 键 词： | 纳米微晶 TiO2 RF-PVCD 制备 表征 |
| 文章编号： | 1005-0299（2005）04-0411-04 |
| 收稿时间： | 2004-01-02 |
| 修稿时间： | 2004-01-02 |
Preparation and characterization of TiO2 nano-microcrystals by radio frequency plasma chemical vapor deposition |
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| XU Hai-ping,SUN Yan-ping,WANG Jun-wen,CHEN Xin-mou. Preparation and characterization of TiO2 nano-microcrystals by radio frequency plasma chemical vapor deposition[J]. Materials Science and Technology, 2005, 13(4): 411-414,419 |
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| Authors: | XU Hai-ping SUN Yan-ping WANG Jun-wen CHEN Xin-mou |
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| Abstract: | TiO2 nano-microcrystals were prepared by Radio Frequency Plasma Chemical Vapor Deposition (RF-PCVD) with TiCl4. The operation conditions controlling the particle size and crystal transition were also investigated. The properties of TiO2 particles including chemical composition, morphology, size, structure of crystal phase were characterized by XPS, TEM, XRD and BET etc. The results show that the most particles in the obtained Ti02 nano-microcrystals were spherical. The particle size was about 30 -50 nm with narrow distribution. Both anatase and rutile phases with complete crystallization were found in particles and the rutile phase can be adjusted from 26. 7% to 53. 6% . |
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| Keywords: | nano-microcrystal TiO2 RF-PCVD preparation characterization |
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