| 硬脆材料皮秒激光微加工试验研究 |
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| 引用本文： | 朱浩,张朝阳,徐坤,戴学仁,赵斗艳. 硬脆材料皮秒激光微加工试验研究[J]. 电加工与模具, 2020, 0(1): 43-46 |
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| 作者姓名： | 朱浩 张朝阳 徐坤 戴学仁 赵斗艳 |
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| 作者单位： | 江苏大学机械工程学院激光技术研究所 |
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| 基金项目： | 江苏省自然科学基金-青年基金项目(BK20180875);国家自然科学基金面上项目(51675242);中国博士后科学基金特别资助项目(2019T120392);中国博士后科学基金面上项目(2018M640461);江苏大学高级人才科研启动金资助项目(18JDG011) |
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| 摘 要： | 硬脆材料微加工中常存在材料易崩裂、刀具磨损严重、加工效率低等不足,引入超短脉冲激光微加工技术,通过光-热-力效应引发材料去除,可有效克服上述加工难题。以羟基磷灰石生物陶瓷、氧化铝工程陶瓷、单晶硅三种典型硬脆材料为加工对象,探索基于皮秒激光的微加工工艺方法,尝试利用激光干切、液体辅助、化学辅助等不同手段,完成微槽、微孔等结构的高质量加工,并分析微加工表面特征形貌,评估工艺方法可行性。
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| 关 键 词： | 皮秒激光 硬脆材料 微结构 |
The Experimental Study of Micro-machining of Hard-brittle Materials Using Ultra-short Picosecond Laser |
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| ZHU Hao,ZHANG Zhaoyang,XU Kun,DAI Xueren,ZHAO Douyan. The Experimental Study of Micro-machining of Hard-brittle Materials Using Ultra-short Picosecond Laser[J]. Electromachining & Mould, 2020, 0(1): 43-46 |
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| Authors: | ZHU Hao ZHANG Zhaoyang XU Kun DAI Xueren ZHAO Douyan |
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| Affiliation: | (Institute of Laser Technology,School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | Shortcomings such as material easy to crack,obvious tool wear and low processing efficiency usually happen in micro-machining of hard-brittle materials,and the introduction of ultra-short pulse laser micro-machining technology to cause material removal through light-thermal-force effect can effectively overcome the mentioned processing problems.Using hydroxyapatite bioceramics,alumina engineering ceramics and single crystal silicon as three typical hard-brittle materials as processing objects,the article explores the micro-machining method based on picosecond lasers and try to use laser dry cutting,liquid assistance and chemical assistance means to complete high quality machining of micro-grooves,micro-holes and other structures,and then the micro-machined surface features are analyzed to evaluate the feasibility of the process. |
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| Keywords: | picosecond laser hard-brittle material micro-structure |
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