微纳米力学测试系统的研制

采用闭环控制微纳压电位移驱动器为核心加载装置,以压电式微力传感器作为测量装置,集成显微光学数字视频监测系统,并编写完整的测量、控制与标定算法软件,研制量程0.1m N-500m N的全自动微纳米力学测试系统。该系统具有被测样品与实验探针的自动定位、可编程自动加载与显微实时监测与记录功能,能够满足小至微米级样品的实验要求,填补现有微纳测试仪器因量程过小或功能不足等问题所导致的空白,预期可应用于微纳机电、微纳米材料、生物医学工程等领域。

Development of Micro/Nano Mechanical Testing System

A micro/nano mechanical testing system with range ability of 0. 1mN-500mN was developed, which used a closed-loop control piezoelectric micro/nano-displacement actuator as primary loading device, a piezoelectric micro-force transducer as measuring device, and an optical microscopic digital video system as monitoring device, all together with a set of user-designed programs for measurement, control and fabrication. This testing system possesses the functions of automatic positioning of testing probe to specimen, programmable automatic load apply, microscopic real-time monitoring and record. It can meet the requirements of the tests when the specimens are of micrometer size, and supply the gap due to narrow measurement range or limited functions of current micro or nano testing apparatus. This system is very promising in the fields of micro- and nano-electro-mechanical system, micro and nano materials, biomedical engineering.