| 显微剪切干涉表面粗糙度轮廓测量 |
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| 引用本文： | 刘晓军,高咏生.显微剪切干涉表面粗糙度轮廓测量[J].华中科技大学学报(自然科学版),2004,32(7):70-71,74. |
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| 作者姓名： | 刘晓军 高咏生 |
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| 作者单位： | 1. 华中科技大学,机械科学与工程学院,湖北,武汉,430074
2. 香港科技大学,机械工程系,香港,九龙 |
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| 基金项目： | 国家自然科学基金资助项目 (5 9975 0 35 ) |
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| 摘 要： | 结合剪切干涉技术与显微干涉技术，提出了显微剪切干涉非接触表面粗糙度轮廓测量方法．由于自参考干涉和共路偏振相移干涉特点，建议的干涉仪具有极好的抗环境干扰和振动的能力，同时能取得一般显微干涉仪的表面粗糙度测量精度，适合制造环境下表面粗糙度精密测量．介绍了发展的显微剪切干涉仪的原理，以及相应于粗糙度轮廓的波前重建算法．实验结果证明了该方法的可行性．
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| 关 键 词： | 粗糙度 剪切干涉 显微干涉 抗振 |
| 文章编号： | 1671-4512(2004)07-0070-02 |
| 修稿时间： | 2003年10月8日 |
The measurement of surface roughness profile by shearing and microscope interference |
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| Liu Xiaojun Gao Yongsheng Liu Xiaojun Dr., College of Mech. Sci. & Eng.,Huazhong Univ. of Sci. & Tech.,Wuhan ,China..The measurement of surface roughness profile by shearing and microscope interference[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,2004,32(7):70-71,74. |
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| Authors: | Liu Xiaojun Gao Yongsheng Liu Xiaojun Dr College of Mech Sci & Eng Huazhong Univ of Sci & Tech Wuhan China |
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| Affiliation: | Liu Xiaojun Gao Yongsheng Liu Xiaojun Dr., College of Mech. Sci. & Eng.,Huazhong Univ. of Sci. & Tech.,Wuhan 430074,China. |
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| Abstract: | Combining the shearing interference technique with microscope interference technique, we proposed a shearing microscope interferometry for the measurement of surface roughness profile. Due to the characteristics of self reference ad common path polarized phase shifting, the proposed interferometry possessed anti vibration and anti disturbance from environment and had similar accuracy to general interferometry for surface roughness measurement. It was suitable for roughness measurement in manufacturing environment. The basic measurement principle and wave front recovery algorithm corresponding to roughness profile were introduced. The experimental result proved the feasibility of the interferometry. |
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| Keywords: | roughness profile shearing interference microscope interference anti vibration |
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