| 基于四相检测技术的微电容传感器 |
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| 引用本文： | 杨三序. 基于四相检测技术的微电容传感器[J]. 传感器与微系统, 2003, 22(10): 13-15 |
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| 作者姓名： | 杨三序 |
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| 作者单位： | 商丘师范学院,物理系,河南,商丘,476000 |
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| 摘 要： | 一种基于四相检测技术的电荷转移式微电容传感器,具有很强的消除杂散电容影响的能力,适用于被检测对象电容值小于1pF的场合,分辨力达1fF,灵敏度高于1V/pF,并能输出4～20mA的电流。其优良的性能和低廉的价格,使得微电容传感器的广泛推广应用成为可能。
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| 关 键 词： | 微电容传感器 四相检测 杂散电容 |
| 文章编号： | 1000-9787(2003)10-0013-03 |
| 修稿时间： | 2003-04-28 |
Micro-capacitance sensor based on a four-phase detection technique |
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| Abstract: | A charge transfer micro capacitance sensor,which is based on a four phase detection technique, has a good stray immune function and is suitable for the case where the capacitance value to be measured is less than 1?pF. It has a high resolution of 1?fF and a sensitivity higher than 1?V/pF. It can also output an industrial standard current of 4～20?mA.The micro capacitance sensor is possible to be wide spread for its good performance and low cost. |
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| Keywords: | micro-capacitance sensor four-phase detection stray capacitance |
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