基于微射流抛光系统的温度精密控制系统的设计

提出了一种超调制冷热补偿技术，解决了由于大功率制冷源导致的控制系统惯性大，系统稳态时间长的难题。该方法克服了传统PID算法参数调整复杂，超调量大的缺点，将传统大惯量时滞温控系统的开机预热稳定平衡时间大范围缩短。运用该技术进行抛光液恒温供给系统的设计，最终实现了液体的温度超高精度的控制。实验结果表明，当系统设定值与环境温度温差值在10℃以内时，采用超调制冷热补偿方法，开机预热时间控制在10min以内，同时系统能够获得优于0.01℃的稳态精度和良好的动态特性，能够满足工业控制领域恒温系统的温度精密控制要求。

The Design of Precise Temperature Control System Based on Micro Jet Polishing

This paper proposes a technology which can adjust the heat and thermal co-mpensation and solve the prob-lem that large refrigeration source of inertia due to big difficult. This method overcomes the disadvantage of traditional adjustment of PID which have complex algorithm parameter and large amount of overshoot of faults.Shortened a wide range of stable equilibrium time large time.Using this technique, the design of the polishing liquid temperature supply system finally achieved the liquid of high precision temperature control. Experimental results show that when the system Settings and temperature difference value within 10℃, environment temperature cold heat compensation methods is made of super modulation control within 10mim warm-up time, at the same time the system can achieve 0.01℃ high steady state accuracy and good dynamic characteristics which can also satisfy the thermostat supply system in the do-main of industrial control precision temperature control adjustment.