| 高精度CCD尺寸自动检测系统的光学系统设计 |
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| 引用本文： | 孙学珠,付维乔,刘庆,王庆有.高精度CCD尺寸自动检测系统的光学系统设计[J].应用光学,1995,16(1):9-12. |
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| 作者姓名： | 孙学珠 付维乔 刘庆 王庆有 |
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| 作者单位： | 天津大学精密仪器系 |
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| 摘 要： | 介绍测量精度为±０．００３ｍｍ的ＣＣＤ尺寸检测系统的光学系统设计特点及远心物镜设计原理，并给出了测试结果。
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| 关 键 词： | 尺寸测量 CCD 远心物镜 光学系统 |
THE DESIGN OF OPTICAL SYSTEM IN A HIGH ACCURACY CCD SIZE CHECKING SYSTEM |
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| Sun Xuezhu, Fu Weiqiao, Liu Qing, Wang Qingyou.THE DESIGN OF OPTICAL SYSTEM IN A HIGH ACCURACY CCD SIZE CHECKING SYSTEM[J].Journal of Applied Optics,1995,16(1):9-12. |
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| Authors: | Sun Xuezhu Fu Weiqiao Liu Qing Wang Qingyou |
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| Abstract: | The optical system design property and acentric objective design principle of a CCD size checking system with a measuring accuracy of to. 003urn are described and the testing results are given. |
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| Keywords: | size measuring linear array CCD acentric objective optical system |
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