紫外-真空紫外成像光谱仪校准技术研究

紫外-真空紫外成像光谱仪在我国空间探测中的应用越来越广，在其研制过程中需对其进行校准，但目前国内尚无针对紫外-真空紫外成像光谱仪的计量标准，无法保证测量结果的准确可靠。该文设计了一种紫外-真空紫外成像光谱仪校准装置，实现对紫外-真空紫外成像光谱仪的光谱范围、波长、光谱响应度、空间角分辨率、均匀性等参数的校准。经测试验证，波长测量不确定度为0.080 nm（k=2），光谱响应度测量不确定度为6.8%（k=2），空间角分辨率测量不确定度为0.022 mrad（k=2），均匀性测量不确定度为4.2%（k=2）。

Research for calibration technology of ultraviolet-vacuum ultraviolet imaging spectrometer

UV-VUV imaging spectrometer has been widely used in space exploration in China. It needs to be calibrated in its development process. However, there is no corresponding measurement standard in China, which can not guarantee the accuracy and reliability of the measurement results. Therefore, a calibration device and method of UV-VUV imaging spectrometer was designed to calibrate the parameters of UV-VUV imaging spectrometer, such as spectral range, wavelength, spectral responsivity, spatial angular resolution, uniformity, etc. The results show that the uncertainty of wavelength measurement is 0.08 nm ( k=2), the uncertainty of spectral responsivity measurement is 6.8% ( k=2), the uncertainty of spatial angular resolution measurement is 0.022 mrad ( k=2), and the uncertainty of uniformity measurement is 4.2% ( k=2).