| 微悬臂梁制作中的牺牲层释放工艺研究 |
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| 引用本文： | 梁明富,赵翔. 微悬臂梁制作中的牺牲层释放工艺研究[J]. 南京工业职业技术学院学报, 2010, 10(4): 10-12 |
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| 作者姓名： | 梁明富 赵翔 |
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| 作者单位： | 扬州市职业大学机械工程学院,江苏扬州225009 |
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| 摘 要： | 探讨了微悬臂梁的制作中的牺牲层释放工艺,针对FPA结构中微悬臂梁的结构层和牺牲层材料的选择和制作方法,从释放机理的角度对磷硅玻璃腐蚀速率等释放关键技术作了研究,给出了相应的加工参数。
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| 关 键 词： | 微悬臂梁 工艺 牺牲层 结构层 腐蚀 |
Study of the Sacrificial Layer Release Techniques in Micro Cantilever Manufacturing |
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| LIANG Ming-fu,ZHAO Xiang. Study of the Sacrificial Layer Release Techniques in Micro Cantilever Manufacturing[J]. Journal of Nanjing Institute of Industry Technology, 2010, 10(4): 10-12 |
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| Authors: | LIANG Ming-fu ZHAO Xiang |
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| Affiliation: | (Yangzhou Polytechnic College,Yangzhou 225009,China) |
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| Abstract: | This paper discusses the sacrifice level release craft in the micro cantilever manufacturing,and according to the material and making of the structural layer and the sacrificial layer in FPA,studies the key release technologies of phosphosilicate glass corrosion rate in terms of release mechanism and presents the relevant manufacturing parameters. |
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| Keywords: | micro cantilever technique sacrificial layer structure layer corrosion |
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