一种新型微空阴极结构的大气压射频冷等离子体源

介绍微空阴极的结构和物理机理，着重介绍一种新型大气压下射频激励的大面积冷等离子体源——融合空心阴极(fused hollow cathodes，FHC).结合应用和与之有关的研究，简单介绍空心阴极的放电特性，以及影响其放电特性的因素，如阴极材料、气体种类、频率、气体流速、气压、阴极内径等.另外提到了其他两种相关的微空阴极系统. 关键词： 微空阴极 大气压 冷等离子体 射频

A new atmospheric RF cold plasma source with microhollow cathode structure

The configuration and mechanism of a microhollow cathode discharge (MHCD) is introduced in this paper. The focus is a new type of cold atmospheric large-area plasma source, the fused hollow cathode (FHC) plasma source based on radio frequency hollow cathodes. Through its applications and related research, we present the characteristics of the hollow cathode discharge and the factors on which its characteristics depend, such as the cathode material, gas specy, frequency, gas flow, pressure, inner diameter of cathode, and the like. Two other types of related MHCD systems are given in addition.