| 本征微晶硅薄膜的结构演变及其对太阳电池光伏性能的影响 |
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| 引用本文： | 袁育杰,侯国付,张建军,薛俊明,赵颖,耿新华.本征微晶硅薄膜的结构演变及其对太阳电池光伏性能的影响[J].半导体学报,2008,29(11). |
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| 作者姓名： | 袁育杰 侯国付 张建军 薛俊明 赵颖 耿新华 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,天津,300071;光电信息技术科学教育部重点实验室,天津,300071;光电子薄膜器件与技术天津市重点实验室,天津,300071 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)，国家重点基础研究发展计划(973计划) |
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| 摘 要： | 采用高压射频等离子体增强化学气相沉积(RF-PECVD)方法制备本征硅薄膜和n-i-P结构太阳电池,研究了氢稀释率对本征硅薄膜的电学特性和结构特性的影响.采用光发射谱(OES)和喇曼(Raman)散射光谱研究了处于过渡区的本征硅薄膜的纵向结构演变过程.结果表明:光发射谱和喇曼散射光谱可以作为研究硅薄膜的纵向结构演变有效手段.随着氢稀释率的增加,硅薄膜从非晶相向微晶相过渡时,其纵向结构的改变会严重影响硅薄膜太阳电池的光伏性能.
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| 关 键 词： | 微晶硅 结构演变 硅薄膜太阳电池 |
The Microstructure Evolution of Intrinsic Microcrystalline Silicon Films and Its Influence on the Photovoltaic Performance of Thin-Film Silicon Solar Cells |
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| Yuan Yujie,Hou Guofu,Zhang Jianjun,Xue Junming,Zhao Ying,Geng Xinhua.The Microstructure Evolution of Intrinsic Microcrystalline Silicon Films and Its Influence on the Photovoltaic Performance of Thin-Film Silicon Solar Cells[J].Chinese Journal of Semiconductors,2008,29(11). |
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| Authors: | Yuan Yujie Hou Guofu Zhang Jianjun Xue Junming Zhao Ying Geng Xinhua |
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| Abstract: | Hydrogenated microcrystalline silicon(μc-Si:H)intrinsic films and solar ceils are prepared by plasma enhanced chemical vapor deposition(PECVD)with various hydrogen dilution ratios.The influence of hydrogen dilution ratios on electrical characteristics is investigated to study the phase transition from amorphous to microcrystalline silicon.During the deposition process,the optical emission spectroscopy(OES)from plasma is recorded and compared with the Raman spectra of the films,by which the microstructure evolution of different H2 dilution ratios and its influence on the performance of μc-Si:H n-i-P solar ceils is investigated. |
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| Keywords: | microcrystalline silicon structure evolution thin film silicon solar cells |
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