| 多孔SiO2增透膜改性研究 |
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| 引用本文： | 刘小林,张伟清,乐月琴.多孔SiO2增透膜改性研究[J].硅酸盐通报,2000,19(5):3-8. |
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| 作者姓名： | 刘小林 张伟清 乐月琴 |
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| 作者单位： | 1. 上海铁道大学基础部,上海,200331
2. 中国科学院上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 本文通过在ＳｉＯ２溶胶中掺入聚乙二醇（ＰＥＧ）或同时掺入ＰＥＧ和聚硅氧烷，研究了改性后ＳｉＯ２增透膜的性能。结果表明掺入ＰＥＧ仅提高了薄膜的激光损伤阈值，而同时掺入ＰＥＧ和聚硅烷不仅提高了薄膜的激光损伤阈值，还极大地提高了膜层的抗机械损伤能力，延长了薄膜的使用寿命，达到了改善薄膜性能的目的。
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| 关 键 词： | 多孔二氧化硅 增透膜 聚乙二醇 聚硅氧烷 |
Study on the Modification of Porous Silica Antireflective Films |
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| Liu Xiaolin,Zhang Weiqing,Yue Yueqin.Study on the Modification of Porous Silica Antireflective Films[J].Bulletin of the Chinese Ceramic Society,2000,19(5):3-8. |
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| Authors: | Liu Xiaolin Zhang Weiqing Yue Yueqin |
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| Abstract: | In this paper,the properties of the silica antireflective film doped with PEG (polyethylene glycol)or both of PEG and siloxane were studied.It is shown that the laser damage threshold of the film doped with PEG is improved,and with PEG and siloxane, both the laser damage threshold and the scratch resistant capability of the film are improved simultaneously.The service life is also prolonged. |
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| Keywords: | porous silica antireflective film polyethylene glycol siloxane |
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