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Design,simulation and fabrication of LTCC-based microhotplate for gas sensor applications |
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| Authors: | Kulhari Lokesh Khanna P K |
| Affiliation: | 1.Advanced Packaging Group, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, 333031, India ;2.Amity University, Amity Education Valley, Kant Kalwar, NH-11C Jaipur Delhi Highway, Jaipur, Rajasthan, 303007, India ; |
| Abstract: | Microsystem Technologies - This paper presents the design, simulation and fabrication of LTCC-based isothermally interconnected microhotplate. A thermal electric finite element analysis is used to... |
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