应用ELID技术进行微晶玻璃超精密磨削

由于微晶玻璃具有优良的物理、机械性能，在光学等领域得到了越来越多的应用。ELID磨削利用在线．电解的方法修整超细粒度的金刚石砂轮，可以有效地实现硬脆材料的超精密加工。本文将ELID磨削技术应用于微晶玻璃的超精密加工，通过改进ELID磨削的关键技术，包括砂轮电火花整形、电解修整电源和ELID磨削液的改进，实现了微晶玻璃的超精密磨削加工，同时通过采用原子力显微镜对不同磨削参数下的工件表面进行分析，以保证在塑性状态下对微晶玻璃进行磨削。因此提高了ELID磨削的质量。获得了Ra2．308nm的较好表面质量。

Ultra-precision Grinding of Glass-Ceramic by ApplyingELID Technique

Glass Ceramic is widely used in optics and other areas because of its good physical and mechanical characteristics. By applying in-process electrolytic method to dress ultra-fine diamond wheel, ELID (Electrolytic in-process Dressing) grinding can effectively achieve the ultra-precision machining of hard and brittle materials. In this paper ELID grinding technique has been used to the ultra-precision of glass ceramic. By improving the key technology of ELID grinding, including electric pulse truing of grinding wheel, electrolytic dressing power and grinding fluid, the ultra-precision grinding of glass ceramic is completed. The grinding surfaces of different grinding conditions are analyzed by using an AFM so as to reach the ductile mode grinding. The grinding surface quality of glass ceramic is increased and the surface roughness is Ra 2.308nm measured by an AFM.