CF4在Al2O3上的分解反应——最佳反应温度探索

以程序升温及恒温反应方式研究了CF4在Al2O3上的分解反应，测试了CF4的转化率，用XRD、比表面积测试、SEM-EDS等技术对反应前后的Al2O3进行了结构表征。结果表明：程序升温反应至700℃时CF4转化率达到最高；850℃恒温反应时γ-Al2O3的结构稳定性和反应活性较高，900℃反应时部分γ-Al2O3转变成了低活性的α-Al2O3导致比表面积和CF4转化率急剧下降。850℃是γ-Al2O3与CF4反应的最佳温度。

CF4 decomposition over Al2O3-the search for optimal reaction temperature

CF4 decomposition over Al2O3 was carried out by the way of temperature-programmed and constant temperature responses. The CF4 conversion was tested, the structure before and after reaction of Al2O3 was characterized by XRD, specific surface area measurement and SEM-EDS. The conversion of CF4 temperature-programmed decomposition over Al2O3 reached a high level at 700℃. At the isothermal reaction stage, γ-Al2O3 was stable at 850℃, while CF4 conversion decreased sharply with time on stream at 900℃ due to the transformation of un-reacted γ-Al2O3 into inactive α-Al2O3. Based on the results, the optimal reaction temperature for CF4 decomposition over γ-Al2O3 is 850℃.