基于卡尔曼预测的差动共焦轮廓跟踪测量方法

针对轴向扫描式差动共焦测量法(ASDCM)测量轮廓效率低下问题，提出一种基于卡尔曼预测的差动共焦轮廓跟踪测量方法。该方法使用激光差动共焦轴向响应曲线数百纳米量程的线性区间实现了表面连续轮廓高精度线性传感测量，提高了测量效率；同时引入基于卡尔曼预测器的轮廓跟踪原理利用已测轮廓点数据对未测表面预测并跟踪，扩展了线性传感轮廓测量法测量范围。实验结果表明，该方法相对于ASDCM法测量效率提升了8倍，且实现了轮廓PV值大于线性传感测量范围的标准椭圆柱高精度跟踪测量，激光聚变靶丸内轮廓圆度重复测量标准差达3 nm。为精密元器件表面连续轮廓的高精度、快速、无损测量提供了一种高质量方法。

Differential confocal profile tracking measurement method based on Kalman prediction

It is difficult to realize high efficiency of axial scanning differential confocal measurement (ASDCM). In this article, adifferential confocal profile tracking measurement method based on Kalman prediction is proposed. In this method, the linear range ofhundreds of nanometers of laser differential confocal axial response curve is used for high-precision linear sensing measurement of thecontinuous surface profile, which improves the measurement efficiency. Meanwhile, the Kalman predictor profile tracking method isintroduced to predict and track the unmeasured surface using the measured profile point data, which expands the range of linear sensingprofile measurement. Compared with the ASDCM, experimental results show that the measurement efficiency of this method is improvedby 8 times, the high-precision tracking measurement of the standard elliptical column with the PV value of the outer profile is greaterthan the linear sensing measurement range, and the repeated measurement standard deviation of the roundness of the laser inertialconfinement fusion capsule is 3 nm. It provides a high quality method for high precision, fast and nondestructive measurement ofcontinuous surface profile of rotary precision components.