集成电路综合自动测试系统硬件平台设计

针对当前国内集成电路产业快速发展的现状，通过分析集成电路测试需求，研制了国产超大规模集成电路综合自动测试系统硬件平台。首先设计了基于PXIe总线的硬件平台总体架构方案，其次研制了包含数字测试模块等高性能PXIe测试仪器，进一步构建了测试头等分系统并完成系统集成。采用高性能外部仪器和自检校准分系统，对硬件平台进行了指标测试。基于BM3110MPB开展了测试验证。验证结果表明，硬件平台数字测试单通道最高测试速率为1600Mbps、DPS可实现最大输出电压12V、最大输出电流800mA，具备连接性测试、功能测试、直流参数与交流参数测试等功能。该硬件平台未来可有效满足国产超大规模集成电路测试需要。

Hardware Platform Design of Integrated Circuit Automatic Test System

In view of the rapid development of the domestic IC industry, the hardware platform of the integrated automatic test system for VLSI was developed based on analyzing the requirements of IC testing. Firstly, the overall architecture scheme of the hardware platform based on PXIe bus was designed. Secondly, high-performance PXIe test instruments including digital test modules were developed, and the testing sub-system was further constructed and system integration was completed. A high-performance external instrument and a self-checking and calibration subsystem were used to test the hardware platform, and the test and verification were carried out based on BM3110MPB. The test verification results show that the hardware platform digital test single channel maximum test rate is 1600Mbps, DPS can achieve the maximum output voltage of 12V, the maximum output current of 800mA, with connectivity test, functional test, DC parameters and AC parameters test and other functions. The hardware platform can effectively meet the needs of domestic VLSI testing in the future.