Auto-correlation function analysis of phase formation in iron ion-implanted amorphous silicon layers |
| |
Authors: | T.H Yang L.J Chou |
| |
Affiliation: | Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, ROC |
| |
Abstract: | High-resolution transmission electron microscopy (HRTEM) in conjunction with autocorrelation function (ACF) analysis have been applied to investigate the evolution of structural order in iron ion-implanted amorphous silicon layers. β-FeSi2 nanocrystallites as small as 5 nm in size were detected in 600 °C annealed for 60 min a-Si layers. The embedded nanocrystalline β-FeSi2 was found to grow in the interlayer with annealing temperature. |
| |
Keywords: | β-FeSi2 Nanocrystallite Iron implantation |
本文献已被 ScienceDirect 等数据库收录! |