紫外光驱动微纳结构薄膜的气敏特性研究 |
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引用本文: | 苏星松,周飞,许宗珂,李圆圆,段国韬. 紫外光驱动微纳结构薄膜的气敏特性研究[J]. 电子科技大学学报(自然科学版), 2017, 46(4): 625-629. DOI: 10.3969/j.issn.1001-0548.2017.04.024 |
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作者姓名: | 苏星松 周飞 许宗珂 李圆圆 段国韬 |
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作者单位: | 1.中国科学院固体物理研究所材料物理重点实验 合肥 230031 |
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基金项目: | 国家自然科学基金面上项目11674320国家自然科学基金面上项目51471161国家重点研发计划2016YFC0201103中国科学院青年创新促进优秀会员项目QYZDB-SSW-JSC017中国科学院前沿科学重点研究项目QYZDB-SSW-JSC017安徽省杰出青年科学基金1408085J10 |
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摘 要: | 采用基于有机模板的溶液浸渍-无损转移法制备ZnO微纳多孔有序薄膜,研究了在不同紫外光强度照射下和不同尺寸孔径的ZnO微纳多孔有序薄膜对NO2气敏性能的影响。结果表明,以500 nm聚苯乙烯(PS)球为模板制备的ZnO微纳多孔薄膜传感器,在0.35 mW/cm3紫外光照射下具有较高的灵敏度、较快的响应和恢复时间。随着紫外光强度的增强和孔径尺寸的增大,ZnO微纳多孔薄膜传感器的灵敏度降低;且在紫外光照射下ZnO微纳有序多孔薄膜对乙醇、甲醛、H2S、SO2和CH4等气体具有很好的选择性。
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关 键 词: | 气敏性能 微纳有序多孔薄膜 灵敏度 紫外光 ZnO |
收稿时间: | 2016-09-13 |
Progress in Research on NO2 Gas Sensing Properties of ZnO Micro/Nanoporous Array Thin Films Under UV Irradiation |
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Affiliation: | 1.Key Lab of Materials Physics, Institute of Solid State Physics, Chinese Academy of Sciences Hefei 2300312.Science Island Branch, Graduate School of University of Science and Technology of China Hefei 230026 |
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Abstract: | Zinc oxide (ZnO) mocro/nanoporous array thin film-based gas sensors were prepared by the organic template-based solution dipping——monolithic transfer strategy. The research focuses on nitrogen dioxide (NO2) gas sensing properties of different aperture sizes of ZnO micro/nanoporous array thin films under UV irradiation with different intensity. The results show that ZnO micro/nanoporous array thin film can be obtained by 500 nm polystyrene (PS) as template, the film-based sensor has high sensitivity and fast response and recovery time when the intensity of UV light is 0.35 mW/cm3. This kind of sensor shows good anti-disturbance to the other gases, such as acetone, formaldehyde, H2S, SO2, and CH4. |
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