大长径比皮料玻璃管加工工艺研究及应用

为满足高增益、低噪声微通道板要求的大长径比皮料玻璃管，采用精密机械整形冷加工工艺提高皮料管的几何均匀性，实现微通道板的性能提升。通过改善机床加工误差、对刀误差以及设计合适的机动夹紧机构可有效控制皮料管内圆精磨加工精度。对磨头转速、背吃刀量、轴向进刀速度及金刚砂磨头粒度4个水平因子开展L16正交试验，得出背吃刀量是影响皮料管内圆精磨加工表面质量的主要因素。选择合适的抛光工艺及工装夹具，最终将皮料管的尺寸变化量控制在1%以内，表面粗糙度Ra值有效控制在0.02 μm。通过Φ25 /6型微通道板制板试验，结果表明:减小皮料管的几何尺寸偏差在一定程度上提高了微通道板阵列一致性、开口面积比一致性，以及增益均匀性，对制造高性能微通道板有较好的借鉴作用。

Research and application of processing technology of cladding-tube with large aspect ratio

In order to meet the requirements of high gain and low noise micro-channel plate, the large aspect ratio cladding-tube was proposed. The geometric uniformity of cladding-tube could be improved by using precision mechanical shaping cold working process, so as to improve the performance of micro-channel plate.By improving the machining error, tool setting error of machine tool and designing the appropriate mechanical clamping mechanism, the precision of inner circle finishing of cladding-tube could be effectively controlled. The L16 orthogonal test was carried out on the four horizontal factors of grinding head speed, back cutting amount, axial feed speed and emery grinding head particle size. It was concluded that the back cutting rate was the main factor affecting the surface quality of cladding-tube inner circle finish grinding. By selecting the appropriate polishing process and fixture, the size change of cladding-tube was controlled within 1%, and the surface roughness Ra value was effectively controlled within 0.02 μm. The experimental results of manufacturing Φ25/6 micro-channel plate show that the uniformity of micro-channel array, the uniformity of opening area ratio and gain uniformity are improved to a certain extent by reducing the geometric dimension deviation of cladding-tube, which has a good reference for the researchers engaged in manufacturing high-performance micro-channel plates.