磁流变加工的连续相位板波前及光强特性

对采用磁流变抛光(MRF)工艺加工的大口径连续相位板(CPP)的波前及其光强控制特性进行了分析,对由不同的加工参数(走刀间距和走刀偏置)所加工的三组CPP进行了比较,并分析了MRF加工所引入的中频误差对CPP波前和光强特性的影响。结果表明,走刀间距为2mm、对应走刀偏置范围为0.1~0.3mm时所加工CPP的波前及其光强控制能力较差,远场有一定程度的旁瓣产生;走刀间距为2mm、偏置范围为0.4~0.5mm时所加工CPP和走刀间距为1mm、偏置范围为0.1~0.3mm时所加工CPP相比较,迭代加工效率提高,CPP波前中频误差得到一定的改善。进一步分析表明MRF所引入的中频误差对CPP波前梯度及旁瓣影响较大。

Wavefront and light intensity characteristics of continous phase plated fabricated by magnetorheological finishing

This paper analyzes characteristics of wavefront and light intensity of large-aperture continuous phase plates(CPPs) fabricated by magnetorheological finishing(MRF). Three groups of CPPs fabricated by different processing parameters such as scanning intervals and scanning offsets are compared, and the influence of mid-frequency error introduced by MRF on CPPs wavefront and light intensity are analyzed as well. Total analysis indicates that the performance of CPP is poor when scanning interval is 2 mm and scanning offsets are 0.1-0.3 mm; The iteration fabrication efficiency is higher when scanning interval is 2 mm and scanning offsets are 0.4-0.5 mm compared with that when scanning interval is 1 mm and scanning offsets are 0.1-0.3 mm, and the mid-frequency error is improved as well. Further analysis indicates that mid-frequency error introduced by MRF has a greater impact on CPPs wavefront gradient, near-field and side lobe.