中红外激光器光学薄膜的研制

文章讨论了中红外波段激光器使用的一系列光学薄膜的设计方法和制备工艺。膜系类型涉及截止滤光膜、增透膜与高反膜，根据对称匹配膜层的理论，利用计算机膜系设计优化软件对膜系进行优化后，得到了损耗小、利于制备、重复性好的膜系结构，并且在完成多次实际制备过程后，分析了离子束预处理和离子源辅助蒸发对膜层的影响，确定最优参数的设定值后取得了较好的效果。

Research of Optical Films for Middle Infrared Lasers

A series of techniques for optical thin films at middle infrared band are discussed in the paper, including edge filters, high reflection and antireflection coatings. According to the analytical theory of designing symmetrical match layers, the coating designs of low loss and high reliability have been developed based on the using of computer coating optimization software. At the same time, the influences of pretreatment and plasma source also have been analyzed in the course of preparation and good results have been gotten.