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n+p组合结构臭氧气体传感器研究
引用本文:杨留方,谢永安,李开毅,吴兴惠,赵怀志. n+p组合结构臭氧气体传感器研究[J]. 仪表技术与传感器, 2005, 0(10): 1-3
作者姓名:杨留方  谢永安  李开毅  吴兴惠  赵怀志
作者单位:1. 昆明理工大学材料与冶金工程学院,云南,昆明,650093;玉溪师范学院物理与教育技术系,云南,玉溪,653100
2. 玉溪师范学院物理与教育技术系,云南,玉溪,653100
3. 云南大学佐波传感技术研究中心,云南,昆明,650091
4. 昆明贵金属研究所,云南,昆明,650221
摘    要:n+P型半导体气体传感器是基于气体传感器互补增强原理的一种新结构半导体气体传感器。该种传感器是由两种传导类型不同的敏感体A和B构成,A是n型半导体材料,B是P型半导体材料。理论分析表明:当敏感体A和B满足一定条件时,该种传感器灵敏度高、热稳定性好,在理论的指导下,通过实验和比较,获得了性能较好的n+P组合结构臭氧敏气体传感器。实验结果与理论分析符合得很好。

关 键 词:气体传感器 n+P组合结构 互补增强 灵敏度 热稳定性 臭氧
文章编号:1002-1841(2005)10-0001-03
收稿时间:2005-03-20
修稿时间:2005-07-27

n+p Combined Structure Semiconductor Ozone Gas Sensor
YANG Liu-Fang,Xie Yong-an,LI Kai-Yi,WU Xing-hui,ZHAO Huan-zhi. n+p Combined Structure Semiconductor Ozone Gas Sensor[J]. Instrument Technique and Sensor, 2005, 0(10): 1-3
Authors:YANG Liu-Fang  Xie Yong-an  LI Kai-Yi  WU Xing-hui  ZHAO Huan-zhi
Affiliation:1. Faculty of Material and Metallurgy Engineering, Kunming University of Science and Technology, Kunming 650093, China; 2. Department of Physics and Educational Technology, Yuxi Normal College, Yuxi 653100, China;3. Saba Transduction Technology Research Center of Yunnan University, Kunming 650091, China;4. Institute of Precious Metals, Kunming 650221, China
Abstract:n p structure semiconductor gas sensor based on the compensation-multiplication principle is a newtype gas sensor.The sensor is composed of twosensitive materials Aand B whose conductivetypes are not the same.The material Ais a n-type materi-al,and Bis a p-type material.The results analyzedfromthe theoretical viewpoint showedthat the n p combined structure semicon-ductor gas sensor has higher sensitivity and better thermal stability whenthe materials Aand Bsatisfied certain conditions.The condi-tions to achieve these characteristics of the n p combined structure semiconductor gas sensor were presented.The perfect n p com-bined structure ozone gas sensor wasfabricated andtested.The experimental results showedthat they concurred withtheoretical analysisvery well.
Keywords:Gas Sensor  n p Combined Structure  Compensation-multiplication  Sensitivity  Thermal Stability  Ozone
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