| 电离式碳纳米管气体湿度传感器 |
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| 引用本文： | 回兵,徐东,王雨化,陈长鑫,张亚非.电离式碳纳米管气体湿度传感器[J].固体电子学研究与进展,2012,32(1):64-67. |
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| 作者姓名： | 回兵 徐东 王雨化 陈长鑫 张亚非 |
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| 作者单位： | 上海交通大学微纳科学技术研究院 薄膜与微细技术教育部重点实验室 上海 200240 |
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| 基金项目： | 国家自然科学基金，上海市青年科技启明星计划，全国优秀博士学位论文作者专项资金资助项目 |
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| 摘 要： | 研究了一种新颖的碳纳米管气态离化结构的碳纳米管气体湿度传感器。该传感器具有一对或多对叉指状侧壁电极结构,电极上覆盖一层多壁碳纳米管薄膜,其利用碳纳米管高长径比的尖端电场收敛作用增大局部电场,有效地增强了传感器对气体湿度的敏感性。通过搭建的气体湿度测试平台,对传感器的静态和动态气体湿度特性进行了研究,结果显示传感器对60%以上相对气体湿度表现出了较强的灵敏度。与吸附式等传统气体湿度传感器对比,该气体湿度传感器具有较快的响应速度(约为0.15 s)和回复速度(约为0.6 s),较传统湿度传感器高了一个数量级,能够用于实时并且快速的气体湿度参量标定。
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| 关 键 词： | 气体湿度传感器 多壁碳纳米管 极化 |
An Ionization-type Carbon-nanotube Gas Moisture Sensor |
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| HUI Bing
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XU Dong
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WANG Yuhua
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CHEN Changxin
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ZHANG Yafei.An Ionization-type Carbon-nanotube Gas Moisture Sensor[J].Research & Progress of Solid State Electronics,2012,32(1):64-67. |
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| Authors: | HUI Bing XU Dong WANG Yuhua CHEN Changxin ZHANG Yafei |
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| Affiliation: | (Key Lab.for Thin Films and Microfabrication of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai,200240,CHN) |
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| Abstract: | A novel carbon-nanotube gas moisture sensor with gaseous ionization structure is developed.The moisture sensor has a structure of interdigitated electrodes covered with a layer of multi-walled carbon nanotubes.The converging effect of tip electric field to strengthen local electric field due to the large ratio of length to diameter of carbon nanotubes greatly enhances the sensitivity of this sensor to moisture.The static and dynamic response characteristic to moisture for this sensor is studied by a self-built test platform.The results show high sensitivity of the moisture sensor to gas with relative humidity above 60%.Compared to traditional moisture sensors,this gas moisture sensor possesses higher response and recovery speed.It can be utilized in occassions where the real-time humidity measurement need to be carried out. |
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| Keywords: | gas moisture sensor multi-walled carbon nanotubes polarization |
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