| 基于现场总线的硅片自动装卸控制系统设计 |
| |
| 引用本文： | 郭忠君,魏唯,何华云,吕文利,王慧勇. 基于现场总线的硅片自动装卸控制系统设计[J]. 自动化与仪器仪表, 2012, 0(1): 49-50 |
| |
| 作者姓名： | 郭忠君 魏唯 何华云 吕文利 王慧勇 |
| |
| 作者单位： | 中国电子科技集团公司第四十八研究所 长沙,410111 |
| |
| 摘 要： | 开发了一种基于现场总线的硅片自动装卸控制系统。系统采用PROFIBUS-DP总线和ASI总线相结合的控制方式,实现了PECVD石墨舟硅片的装卸过程自动化,提高了太阳能电池片生产线的生产效率和自动化水平,降低了劳动强度,提高了产品质量。
|
| 关 键 词： | 现场总线 PROFIBUS-DP AS-i 自动装卸 |
Based on field bus control system of automatic loading and unloading silicon chip design |
| |
| Affiliation: | GUO Zhong-jun, WEI Wei, HE Hua-yun, etal. |
| |
| Abstract: | The control system for auto loading and unloading of solar waferhandling based on fieldbus was presented.Automatic loading and unloading of solar waferhandling of graphite boats of PECVD can be controlled through the control mode which combined with PROFIBUS-DP and ASI.This solution enhanced the efficiency and the automation level of solar cells produce line,reduced the labour intensity,improved the product quality. |
| |
| Keywords: | Fieldbus PROFIBUS-DP AS-i Auto Loading and Unloading Waferhandling |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
