| 溶胶-凝胶法制备钛酸锶钡铁电薄膜的研究 |
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| 引用本文： | 方瑜,肖定全,刘娟妮,朱建国.溶胶-凝胶法制备钛酸锶钡铁电薄膜的研究[J].无机盐工业,2005,37(6):21-22. |
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| 作者姓名： | 方瑜 肖定全 刘娟妮 朱建国 |
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| 作者单位： | 四川大学材料科学系,四川,成都,610064 |
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| 基金项目： | 国家自然科学基金资助项目(项目编号:10175045) |
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| 摘 要： | 钛酸锶钡(BST)薄膜是一类重要的铁电薄膜材料。采用溶胶-凝胶法制备了不同组分的具有钙钛矿结构的BST薄膜。利用X射线衍射技术(XRD),研究了不同退火条件下BST薄膜的结晶特性,结果表明制备的BST薄膜形成了单一的钙钛矿结构;利用扫描电子显微镜(SEM)和原子力显微镜(AFM)观察了薄膜的表面形貌,结果表明制备的BST薄膜光滑,平整,无明显的孔洞和裂纹,且生长良好。BST薄膜的晶粒细致,排列整齐,分布均匀,呈现球状。
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| 关 键 词： | 钛酸锶钡 铁电薄膜 溶胶-凝胶 |
| 文章编号： | 1006-4990(2005)06-0021-02 |
| 修稿时间： | 2005年2月20日 |
Preparation of (Ba, Sr)TiO3 thin films by sol -gel method |
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| Fang Yu,Xiao Dingquan,Liu Juanni,Zhu Jianguo.Preparation of (Ba, Sr)TiO3 thin films by sol -gel method[J].Inorganic Chemicals Industry,2005,37(6):21-22. |
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| Authors: | Fang Yu Xiao Dingquan Liu Juanni Zhu Jianguo |
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| Abstract: | Barium strontium titanate(BST) thin films are one kind of important ferroelectric thin films.(Ba,Sr)TiO_3 thin films with perovskite structure are fabricated by sol-gel processing.The crystallization properties of the BST thin films with different annealing conditions are investigated by XRD analysis and the result shows that all the BST thin films form a single perovskite structure.The SEM and AFM analysis show that the BST thin films have a smooth and flat surface,and have no apparent pores and cracks.The small and spherical crystal grains are fine and arranged in good order and well-distributed. |
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| Keywords: | barium strontium titanate ferroelectric thin films sol-gel |
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