| 快速循环热处理对(Co0.35Fe0.65)99O1薄膜磁性能的影响 |
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| 引用本文： | 荆玉兰,张怀武,蒋向东.快速循环热处理对(Co0.35Fe0.65)99O1薄膜磁性能的影响[J].电子科技大学学报（自然科学版）,2006,35(2):246-248. |
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| 作者姓名： | 荆玉兰 张怀武 蒋向东 |
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| 作者单位： | 1.电子科技大学微电子与固体电子学院 成都 610054 |
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| 基金项目： | 国防科研预研基金，四川省基础应用研究项目 |
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| 摘 要： | 针对(Co0.35Fe0.65)99O1薄膜,研究了两种不同热处理工艺对其磁性能的影响。结果表明:快速循环热处理可以改善高磁矩(Co0.35Fe0.65)99O1薄膜磁性能,在450℃几个快速循环热处理后,沉积薄膜的矫顽力从105下降到3 Oe,电阻率下降到70%,a-Fe (Co)相晶粒尺寸可以减小到15~35 nm,该处理方法较以往的热处理更能改善软磁薄膜的性能。
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| 关 键 词： | 软磁薄膜 高频 记录磁头 热处理 |
| 收稿时间： | 2005-09-06 |
| 修稿时间： | 2005-09-06 |
Influence of Rapid Recurrent Thermal Annealing on Magnetic Properties of CoFe-O Thin Film |
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| JING Yu-lan,ZHANG Huai-wu,JIANG Xiang-dong.Influence of Rapid Recurrent Thermal Annealing on Magnetic Properties of CoFe-O Thin Film[J].Journal of University of Electronic Science and Technology of China,2006,35(2):246-248. |
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| Authors: | JING Yu-lan ZHANG Huai-wu JIANG Xiang-dong |
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| Affiliation: | 1.School of Microelectronics and Solid-State Electronics,UEST of China Chengdu 610054 |
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| Abstract: | The variation of magnetic properties with new Rapid Recurrent Thermal Annealing (RRTA) has been studied in high moment thin film (Co0.35Fe0.65)99O1. After the rapid recurrent thermal annealing the coercivity as-deposited this thin film decreases from 105 to 3 Oe at 450℃ for several periods of times, their resistivity decreases to 70%, and the size of a-Fe(Co)phase can be reduced to 15~35 nm by analysis. Results show that the method is more effective than other methods to improve the magnetic and electrical properties of (Co0.35Fe0.65)99O1 thin films. |
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| Keywords: | soft magnetic thin film high frequency recording head thermal annealing |
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