Analysis of microscopic parameters of surface charging in polymer caused by defocused electron beam irradiation |
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| Affiliation: | 1. Department of Histology, Jagiellonian University Medical College, Kopernika 7, 31-034 Krakow, Poland;2. Institute of Nuclear Physics, Polish Academy of Sciences, Radzikowskiego 152, 31-342 Krakow, Poland;3. Department of Coronary Disease, Jagiellonian University Medical College, John Paul II Hospital, Pradnicka 80, 31-202 Krakow, Poland;4. Deutsches Elektronen-Synchrotron (DESY), Notkestraβe 85, D-22607 Hamburg, Germany;5. Department of Cardiac and Vascular Surgery and Transplantology, Jagiellonian University Medical College, Pradnicka 80, 31-202 Krakow, Poland;1. Western Superconducting Technologies Co. Ltd., Xi’an 710018, China;2. Xi’an Technological University Institute of Information Engineering, 710025, China;3. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China;1. Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Republic of Korea;2. Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology (SeoulTech), Seoul, Republic of Korea;3. Department of Energy Science, Sungkyunkwan University, Suwon, Republic of Korea |
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| Abstract: | The relationship between microscopic parameters and polymer charging caused by defocused electron beam irradiation is investigated using a dynamic scattering-transport model. The dynamic charging process of an irradiated polymer using a defocused 30 keV electron beam is conducted. In this study, the space charge distribution with a 30 keV non-penetrating e-beam is negative and supported by some existing experimental data. The internal potential is negative, but relatively high near the surface, and it decreases to a maximum negative value at z = 6 μm and finally tend to 0 at the bottom of film. The leakage current and the surface potential behave similarly, and the secondary electron and leakage currents follow the charging equilibrium condition. The surface potential decreases with increasing beam current density, trap concentration, capture cross section, film thickness and electron–hole recombination rate, but with decreasing electron mobility and electron energy. The total charge density increases with increasing beam current density, trap concentration, capture cross section, film thickness and electron–hole recombination rate, but with decreasing electron mobility and electron energy. This study shows a comprehensive analysis of microscopic factors of surface charging characteristics in an electron-based surface microscopy and analysis. |
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| Keywords: | Polymer Defocused electron beam Irradiation Surface charging Numerical simulation 61 80 Fe 73 61 Ph 02 60 Cb |
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