电子表格模型在半导体晶圆制造产能规划中的应用

半导体晶圆厂的设备非常昂贵,对设备利用率的要求较高,设计一套简单实用的办法进行产能规划是十分必要的.本文提出了产能规划的三大模块,在前两个模块中将建立半导体晶圆制造产能规划的电子表格模型(Spreadsheet),在第三个模块中利用产能规划模型的数据结果进行分析,总结出一些改进方法.通过在某半导体晶圆厂的实际应用,该产能规划模型有效地解决了投料不均,设备负荷率波动过大等问题.

Application of Spreadsheet in the Capacity Planning of Semiconductor Wafer Fabrication

The equipments of semiconductor manufacturing are very expensive. It is necessary to design a simple and useful approach for capacity planning due to requirement for high equipment utilization. This paper put forward three Modules concerned of capacity planning. A capacity planning model for semiconductor wafer fabrication based on spreadsheet is established in first two modules. Then several optimization methods are concluded from the analysis of data output in the third module. Release uneven and equipment loading fluctuation were eliminated by the capacity planning model which was used in a lab of the case.