| 大孔径内孔表面金刚石薄膜涂层的制备 |
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| 引用本文： | 郑华,孙方宏,彭东辉. 大孔径内孔表面金刚石薄膜涂层的制备[J]. 金刚石与磨料磨具工程, 2009, 0(5): 13-16 |
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| 作者姓名： | 郑华 孙方宏 彭东辉 |
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| 作者单位： | 1. 上海交通大学机械与动力工程学院,上海,200240
2. 上海化工研究院,上海,200062 |
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| 基金项目： | 上海市科技创新行动计划重点项目(No.075211016);;上海市科技创新行动计划专项(No.08DZ0501700) |
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| 摘 要： | 应用热丝化学气相沉积（HFCVD）工艺，并采用合适的衬底预处理方法和优化的工艺参数，在大孔径硬质合金内孔表面沉积了金刚石薄膜。分别采用SEM、EDS和喇曼光谱依次对衬底预处理前后内孔表面及沉积的金刚石薄膜进行了表征，并通过压痕实验评估了薄膜的附着强度。该压痕实验结果与薄膜的SEM及喇曼光谱表征的结果具有一致性。结果表明：采用合适的衬底预处理方法和优化的HFCVD工艺，可以在大孔径硬质合金内孔表面沉积高质量的金刚石薄膜。
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| 关 键 词： | 金刚石薄膜 衬底预处理 热丝化学气相沉积 |
Fabrication of diamond films on the interior surface of large hole |
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| Zheng Hua,Sun Fanghong,Peng Donghui. Fabrication of diamond films on the interior surface of large hole[J]. Diamond & Abrasives Engineering, 2009, 0(5): 13-16 |
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| Authors: | Zheng Hua Sun Fanghong Peng Donghui |
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| Affiliation: | 1.School of Mechanical Engineering;Shanghai Jiao Tong University;Shanghai 200240;China;2.Shanghai Research Institute of Chemical Industry;Shanghai 200062;China |
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| Abstract: | Diamond films were deposited on the interior hole surface of the Co-cemented carbide with large aperture using suitable substrate pre-treatment and optimum process-parameters by the bias-enhanced hot filament chemical vapor deposition(HFCVD) process.SEM,EDS and Raman spectrometer were,respectively,contributed to characterizing un-pretreated and pretreated substrate surfaces and diamond films;and the adhesion of the films was evaluated by Rockwell Hardness test,which was agreed by those characterizations of ... |
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| Keywords: | diamond films substrate pre-treatment HFCVD |
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