精密加工中零重力垂直运动机构的设计与性能检测

精密加工中垂直运动机构的重力载荷会影响其定位性能,通常情况下采用平衡配重装置或流体缸来进行重力补偿。基于传统的重力补偿原理提出一种新型零重力垂直运动机构,应用于精密加工过程中。该机构采用直线电机直接驱动的方式、磁轭和滚动导轨支撑移动平台和平衡配重装置。由于受干扰的运动部件惯性增加一倍,该机构能有效地减小加工干扰力的影响。装置性能测试结果表明,该机构为移动平台的垂直运动提供了优越的驱动特性。

Design and Performance Test of Zero gravity Vertical Motion Mechanism in Precision Machining

In general, a counterweight or a fluidic cylinder is employed for gravity compensation to resolve the poor positioning performance on a vertical motion stage in machining process. Therefore, a novel zero gravity vertical motion mechanism for precision machining was developed. The proposed mechanism was driven by the linear motor,the moving stage and the counterweight were supported by the magnet yoke and rolling guideway. Due to the inertia of moving parts was doubled for disturbance, the mechanism could minimize the influence of machining force effectively. The performance evaluation results show that, the mechanism provides superior driving characteristics to vertical motion stages.