| 高空间分辨率的热测试技术——扫描热显微技术 |
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| 引用本文： | 晋宏师,顾毓沁,陈皓明,朱德忠,韩立,谢志刚.高空间分辨率的热测试技术——扫描热显微技术[J].计量学报,1999,20(4):266-273. |
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| 作者姓名： | 晋宏师 顾毓沁 陈皓明 朱德忠 韩立 谢志刚 |
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| 作者单位： | 清华大学 |
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| 摘 要： | 简述了用扫描热显微技术进行高空间分辨率热测量 试的技术特点和研究现状，介绍了实际测试的情况，初步分析了扫描热地和样品表面间的传热机理，提出了进一步研究的方向。
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| 关 键 词： | 扫描热显微技术 高空间分辨率 热测试技术 |
The Thermal Measurement with High Spatial Resolution: Scanning Thermal Microscopy |
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| Jin Hongshi,Gu Yuqin,Chen Haoming,Zhu Dezhong,Han Li,Xie Zhigang.The Thermal Measurement with High Spatial Resolution: Scanning Thermal Microscopy[J].Acta Metrologica Sinica,1999,20(4):266-273. |
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| Authors: | Jin Hongshi Gu Yuqin Chen Haoming Zhu Dezhong Han Li Xie Zhigang |
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| Affiliation: | Jin Hongshi,Gu Yuqin,Chen
Haoming,Zhu Dezhong,Han Li,Xie Zhigang;(Qinghua University,Beijing
100084) |
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| Abstract: | This paper describes the scanning thermal microscopy(SThM) and its applications.A few experiments have been implemented.The mechanism of heat transfer between the thermal tip of SThM and the surface of the sample is analyzed and the topics of further research are suggested. |
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| Keywords: | Scanning thermal microscopy (SThM) Thermal tip Temperature Thermal conductivity |
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